The ZYGO ZMI2002 is a laser head from the ZMI 2000 series, manufactured by Zygo Corporation.

According to the datasheet from ArtisanTG, the ZMI 2000 System Laser Head “may be the single most critical component of the Displacement Measuring Interferometer”. Displacement measuring interferometry (DMI) is a type of interferometry used to measure the displacement of a surface. It is a highly precise and versatile technique used in a variety of applications, including:

• ·Semiconductor metrology
• ·Tribology (the study of friction, wear, and lubrication)
• ·Biomedical engineering
• ·Optical engineering

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