Lam Research 797-071281-021

Product Overview

The Lam Research 797-071281-021 is a specialized gas-control component used in semiconductor manufacturing equipment. Available industry references identify this part as a mass flow meter/controller and, more specifically, as a HORIBA automatic pressure regulator, GR-312F, for helium at 50 SCCM.

The component is associated with gas delivery and pressure regulation within Lam Research processing equipment. Stable gas control is important in semiconductor manufacturing because process performance can depend on maintaining consistent gas conditions during wafer processing.

As an equipment-specific spare part, the 797-071281-021 is primarily intended for replacement and maintenance rather than general-purpose industrial use.

Product Specifications

The 797-071281-021 is listed as a mass flow meter/controller, pressure type, 1/4 VCR, RoHS, while another listing identifies the unit as a HORIBA GR-312F automatic pressure regulator for helium at 50 SCCM.

Functional Characteristics

Gas delivery systems in semiconductor processing equipment require controlled and repeatable flow or pressure conditions. The 797-071281-021 is designed for this type of specialized gas-management environment.

Its key characteristics include:

• Dedicated Lam Research equipment part number
• HORIBA GR-312F identification
• Designed for helium service
• 50 SCCM flow reference
• 1/4 VCR process connection
• Pressure-control functionality
• RoHS-related compliance reference
• Suitable for semiconductor equipment maintenance

The 1/4 VCR connection is particularly relevant in semiconductor applications because reliable, low-contamination gas connections are important for process equipment.

Construction and Integration

The component is a precision gas-control assembly rather than a conventional electrical control module. Its construction incorporates the pressure-regulation mechanism and process-gas connection interfaces required for integration into the equipment gas-delivery system.

Because it operates within a larger process-gas architecture, correct connection and compatibility are essential. The regulator should be matched with the correct gas line, equipment configuration, pressure requirements, and associated control system.

The available market information links the part number directly with HORIBA equipment and identifies the gas as helium.

Application Areas

The Lam Research 797-071281-021 is intended for semiconductor manufacturing environments. Typical maintenance applications can include:

• Wafer processing equipment
• Semiconductor fabrication systems
• Helium gas delivery circuits
• Process gas pressure regulation
• Replacement of defective gas-control components
• Preventive maintenance inventories
• Legacy Lam Research equipment refurbishment

For production facilities, keeping critical gas-control components available can help reduce equipment downtime when a regulator or related gas-control device needs replacement.

Installation and Maintenance

Before installation, verify the complete 797-071281-021 part number and compare the replacement unit with the existing component. Confirm the gas type, connection configuration, equipment position, and applicable operating requirements.

The gas system should be isolated and safely depressurized before replacement. Technicians should also follow the equipment manufacturer’s service procedures and appropriate clean-gas handling practices.

After installation, inspect all connections carefully and perform the required leak checks. The equipment should then be tested to confirm that the gas-control system reaches the expected operating conditions.

For storage, keep the regulator protected from dust, moisture, contamination, and mechanical damage. Clean and controlled storage is especially important for components used in semiconductor gas-delivery systems.

Why This Part Matters

Precise gas control can directly influence the stability and repeatability of semiconductor processing. A suitable replacement for the original component can therefore help maintenance teams restore equipment operation without unnecessary modifications to the existing gas-delivery architecture.

The 797-071281-021 is particularly useful when maintaining compatible Lam Research equipment that requires the original HORIBA-based pressure-control configuration.

Supply Information

We supply Lam Research semiconductor equipment spare parts for maintenance, repair, replacement, and equipment refurbishment. The Lam Research 797-071281-021 can be sourced for customers requiring a compatible helium gas-control component.

Before purchasing, customers should provide the complete part number and, when available, the equipment model or a photo of the existing component label. This helps confirm the correct configuration, condition, and compatibility before shipment.