Lam Research 853-109614-620 Coaxial Cable Assembly

Short Description:

The Lam Research 853-109614-620 is a high-precision RF coaxial cable assembly engineered for high-density plasma etching and deposition equipment. A

FOB Price: US $0.5 - 9,999 / Piece

Min.Order Quantity: 100 Piece/Pieces

Supply Ability: 10000 Piece/Pieces per Month

Brand: Lam Research

Manager: Jinny

E-mail: sales5@xrjdcs.com

Tel: + 86-18250705533

( WhatsApp )Wechat: + 86-18250705533

Warranty: one year

In stock: In stock

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Lam Research 853-109614-620

Product Overview

The Lam Research 853-109614-620 is a high-precision RF coaxial cable assembly engineered for high-density plasma etching and deposition equipment. As a critical signal interconnection component in Lam Research’s semiconductor manufacturing platform, it is designed to transmit high-frequency electrical energy from RF generators to the plasma load end of process chambers with ultra-low loss and ultra-high fidelity.

More than a conventional connecting cable, the 853-109614-620 functions as a precision transmission system optimized with rigorous impedance matching and phase consistency calibration. Its performance directly determines the stability, uniformity, and repeatability of plasma processing inside reaction chambers. For advanced semiconductor processes at 7nm and below, this cable assembly plays a decisive role in achieving atomic-level precision etching profile control.

Classified as a customized spare part for Lam Research equipment, this model is fully engineered to meet the strict cleanliness, corrosion resistance, and vacuum compatibility requirements of semiconductor manufacturing. It adopts a high-performance solid/semi-rigid conductor structure, low-dielectric-constant insulation medium, and plasma-corrosion-resistant high-reliability connectors. This design ensures superior thermal stability and mechanical durability under continuous high-power RF stress.

As a core component of the RF transmission chain, the assembly effectively suppresses the Voltage Standing Wave Ratio (VSWR) and minimizes signal reflection, protecting high-value RF generators and stabilizing process consistency. It is widely applicable for new equipment installation and preventive maintenance replacement, helping semiconductor manufacturers improve wafer yield and Overall Equipment Effectiveness (OEE).

Product Specifications

Parameter Item	Specification Value
Product Model	Lam Research 853-109614-620
Manufacturer	Lam Research
Product Type	RF Coaxial Cable Assembly / RF Jumper
Characteristic Impedance	50 Ω (Nominal)
Operating Frequency Range	DC to 60 GHz (Typical design, compatible with mainstream 13.56/27.12 MHz and VHF bands)
Insertion Loss	< 0.5 dB (Typical value, subject to specific length and frequency)
VSWR	< 1.25:1 (Full operating frequency band)
Connector Type	High-performance Type N or precision 7/16 DIN male/female (customized for Lam Research terminals, subject to physical product)
Conductor Material	Silver-plated solid copper or silver-plated copper-clad steel (center conductor)
Insulation Material	Low-loss expanded PTFE (ePTFE) or solid PTFE
Outer Conductor / Shielding	Double-layer silver-plated copper braid + aluminum foil or semi-rigid copper tube
Jacket Material	Plasma and corrosion-resistant FEP/ETFE fluoroplastic
Maximum RF Power	> 5 kW CW (Continuous Wave)
Operating Temperature Range	-55°C to +150°C (High-reliability grade)
Typical Physical Length	Custom phase-matched length (1–3 meters typical), tailored to equipment wiring layout

Structure & Composition

The Lam Research 853-109614-620 adopts a three-layer high-reliability structure compliant with strict semiconductor-grade standards. The innermost layer is a high-conductivity silver-plated copper center conductor. Its precisely calibrated diameter ensures optimal power handling and stable 50Ω impedance performance for RF current transmission.

The middle layer is an ultra-low-loss dielectric insulator made of high-purity expanded PTFE (ePTFE). Its uniform microstructure minimizes dielectric loss during RF energy transmission and maintains consistent dielectric constant across all operating conditions.

The outermost layer is a multi-stage shielding system combining silver-plated copper braid and aluminum foil polyester film. This structure delivers superior EMI shielding performance, preventing internal RF signal leakage that may interfere with sensitive equipment circuits and blocking external electromagnetic noise from coupling into the RF transmission path.

Both terminals are equipped with custom high-precision connectors exclusive to Lam Research, rather than standard commercial parts. The connector housing is fabricated from stainless steel or copper alloy with silver/gold plating to deliver excellent plasma corrosion resistance and electrical conductivity. The internal insulating support and contact interface design sustain consistent impedance and low contact resistance after multiple plugging cycles and extreme temperature fluctuations.

Every 853-109614-620 assembly undergoes rigorous Vector Network Analyzer (VNA) factory testing to ensure strictly consistent electrical length and phase response. This uniformity is critical for multi-cathode process chambers, ensuring superposition of multi-channel RF power conforms to preset electric field distribution models and stable process performance.

Key Features & Advantages

1. Ultra-High Power Transmission with Minimal Loss

Combining low-loss PTFE dielectric insulation and high-conductivity silver-plated conductors, the assembly delivers high-power RF energy from generators to process chambers with ultra-low attenuation. It effectively boosts plasma density and improves process throughput, while reducing cable heat generation. This eliminates electrical parameter drift caused by thermal expansion and ensures long-term stable operation of semiconductor processes.

2. Extreme Phase Stability & Consistency

In advanced multi-frequency and multi-cathode etching processes, RF signal phase directly governs plasma uniformity and etching profile verticality. All 853-109614-620 cables undergo 100% phase matching testing during production, ensuring identical electrical delay characteristics as original factory parts. Equipment engineers avoid complex matching network recalibration after cable replacement, significantly reducing equipment downtime and guaranteeing consistent Critical Dimension (CD) across wafer batches.

3. Superior Environmental Resistance & Extended Service Life

Semiconductor process chambers feature harsh operating conditions including corrosive fluorine/chlorine-based gases and continuous vacuum thermal cycling. The FEP/ETFE fluoroplastic outer jacket provides exceptional chemical and plasma corrosion resistance. The reinforced connector locking structure and kink-resistant design prevent mechanical damage during routine chamber maintenance. Its durable construction extends Preventive Maintenance (PM) cycles and reduces factory spare part consumption costs.

Applications

The Lam Research 853-109614-620 is a core RF transmission component for advanced semiconductor wafer fabrication equipment, widely deployed on Lam Research dielectric etchers (2300-series Kiyo / Flex series) and conductor etching systems.

Typical application scenarios include high-aspect-ratio contact etching and gate etching for FinFET and GAA logic devices, as well as deep trench etching and hard mask etching for 3D NAND and DRAM memory chips. The assembly efficiently feeds RF energy into reaction chambers to dissociate process gases and form high-density anisotropic plasma for precise wafer material etching.

In the broader pan-semiconductor industry, it is also compatible with precision RF-controlled deposition processes, including PECVD and HDP-CVD equipment. It solves key manufacturing pain points such as poor process uniformity, increased particle contamination, and equipment self-protection shutdowns triggered by excessive RF reflected power caused by unstable RF transmission. As a Class A critical spare part for 8-inch and 12-inch wafer fabs worldwide, it ensures stable yield and continuous mass production of advanced process nodes.

Installation & Maintenance

Pre-Installation Preparation

Before installing the Lam Research 853-109614-620, ensure the equipment is fully de-energized and locked out/tagged out (LOTO) in safe maintenance mode. Operators must wear dedicated cleanroom gloves to avoid skin grease contamination on connector interfaces. Use a calibrated torque wrench to fasten connectors per Lam Research factory torque specifications; ordinary wrenches are prohibited to prevent precision thread damage.

Inspect inner and outer conductors for bending or scratches before installation, and clean connector interfaces with isopropyl alcohol and lint-free wipes. Maintain a cable bending radius no less than 10 times the cable outer diameter to avoid impedance distortion caused by cable damage.

Maintenance Guidelines

As a high-power RF transmission component, the assembly’s insertion loss and return loss should be trend-monitored via RF network analyzers during every PM cycle. Deteriorated VSWR or abnormal increased insertion loss indicates an early replacement warning.

During routine maintenance, inspect the cable jacket for discoloration or cracking caused by plasma erosion and chemical corrosion, and check connector center conductors for blackening or ablation. When tightening connectors, fix the connector nut with one hand and support the cable body with the other to avoid solder joint loosening from torque transmission to the cable root.

Do not apply non-factory-specified conductive grease or lubricants to the assembly, as such substances will alter original RF electrical characteristics.

Product Warranty & Support

All Lam Research 853-109614-620 units are sourced from reliable supply chains, guaranteeing original factory quality or fully tested compliant alternative products. Every assembly undergoes a complete set of RF performance tests, including insulation withstand voltage, contact resistance, insertion loss, and phase consistency, before delivery. We provide a 12-month quality warranty for all products.

Our professional technical team provides one-stop installation guidance and fault diagnosis services to optimize RF link performance. Sufficient inventory is maintained for long-term supply, enabling rapid response to urgent customer demands, ensuring uninterrupted production line operation, and delivering professional full-lifecycle equipment protection services.