Welcome to our websites!
Lam Research 810-107813-117 Power Component
Lam Research 810-107813-117
Product Overview
The Lam Research 810-107813-117 is a dedicated ESC power supply assembly for Lam Research semiconductor processing equipment. It delivers precise high-voltage power control for electrostatic chuck systems in advanced wafer fabrication.
As a core component of etching and processing equipment, it enables stable wafer holding, accurate positioning and consistent process results. In semiconductor manufacturing, electrostatic chucks fix wafers firmly on process stages while ensuring uniform temperature and precise positioning. This power supply module generates and regulates required electric power to stabilize wafer processing conditions.
Widely adopted for equipment maintenance and replacement, the 810-107813-117 ensures reliable ESC control and long-term production stability in mass semiconductor manufacturing.
Technical Specifications
|
Parameter
|
Description
|
|---|---|
|
Manufacturer
|
Lam Research
|
|
Part Number
|
810-107813-117
|
|
Product Type
|
ESC Power Supply Assembly
|
|
Application
|
Semiconductor Wafer Processing Equipment
|
|
Main Function
|
Electrostatic Chuck Power Control
|
|
Equipment Category
|
Semiconductor Manufacturing System
|
|
Assembly Type
|
Industrial Power Supply Module
|
|
Output Function
|
High Voltage ESC Drive Supply
|
|
Installation Location
|
Process Equipment Control System
|
|
Compatible Industry
|
Semiconductor Fabrication
|
|
Design Type
|
Modular Electronic Assembly
|
|
Maintenance Use
|
Equipment Repair and Replacement
|
Functional Description
This assembly provides accurate and stable power output to drive electrostatic chucks in semiconductor process tools. During wafer production, the ESC generates electrostatic force to secure wafers on processing surfaces. The power supply stabilizes voltage output to maintain firm wafer fixation throughout key processing steps.
It covers multiple core operational functions:
- Generates adjustable and stable ESC operating voltage
- Maintains consistent electrical output during continuous processing
- Supports automatic wafer clamping and releasing cycles
- Performs efficient power conversion and precise regulation
- Guarantees repeatable and uniform semiconductor process performance
Stable ESC power output is critical for precise wafer alignment, uniform plasma treatment and reliable batch manufacturing results.
Hardware Structure and Composition
Power Conversion Section
This core circuit converts input power into stable high-voltage output matching ESC operating requirements. It integrates power switching units, voltage regulation circuits, energy conversion components and electrical protection modules. The integrated design ensures steady output during long-hour continuous wafer processing.
High Voltage Output Interface
The dedicated high-voltage interface transmits regulated power to the electrostatic chuck system. It stably outputs activation voltage to maintain constant wafer clamping force and supports controlled wafer release. This structure effectively avoids wafer displacement and improves overall production consistency.
Control and Monitoring Circuit
The built-in control circuit realizes real-time power regulation and system status feedback. It monitors output voltage and current, detects operating faults and triggers system protection mechanisms. These functions greatly enhance equipment stability and simplify daily troubleshooting.
Connector and Mechanical Assembly
The module adopts standardized connectors and integrated mounting structures, perfectly matching Lam Research process equipment. Its modular design enables quick disassembly and installation, facilitating routine maintenance and fault replacement.
Key Features
- Stable ESC Control: Delivers consistent power supply to stabilize wafer positioning and processing status throughout production.
- Equipment-Specific Design: Customized for Lam Research process tools to adapt to strict semiconductor fabrication environmental requirements.
- High Operational Reliability: Supports long-cycle continuous operation to meet high-frequency semiconductor production demands.
- Modular Replacement Structure: Enables fast module replacement, effectively reducing equipment downtime and improving maintenance efficiency.
- Advanced Process Compatibility: Optimized for precision processes such as plasma etching, ensuring high process repeatability and product yield.
Standard Installation Steps
- Power off the semiconductor process tool following official operating procedures
- Cut off all electrical connections and remove the faulty power supply assembly
- Install the new 810-107813-117 module in place
- Fasten all electrical and mechanical connections firmly
- Complete system self-diagnosis and functional testing to confirm normal operation
Routine Maintenance Tips
- Regularly inspect cables and connectors for damage or aging
- Monitor operating status and eliminate abnormal power supply alarms timely
- Keep equipment heat dissipation channels clean and unobstructed
- Track ESC operating performance during production
- Store spare modules in anti-static packaging environment
Scientific daily maintenance extends component service life and ensures long-term stable production of semiconductor equipment.
Product Advantages
- Professional customization for Lam Research original semiconductor equipment
- Precise and stable ESC power regulation capability
- Guarantees stable and high-precision wafer processing
- Modular structure for quick replacement and convenient maintenance
- Fully adaptable to high-standard semiconductor manufacturing environments
- Effectively reduces production line downtime and maintenance costs
- Suitable for enterprise spare parts inventory management
Industrial Supply Support
We provide genuine Lam Research 810-107813-117 ESC Power Supply Assemblies and a full range of semiconductor equipment spare parts. Our product portfolio covers PCB assemblies, control boards, power modules, sensors and other core process equipment components.
With rich industrial automation and semiconductor equipment service experience, we provide reliable spare part sourcing and professional replacement solutions. We help global customers stabilize equipment operation, reduce maintenance costs and ensure continuous and efficient production.
————————————————————————————————————-
If you would like to learn more about our products and services, please feel free to contact us at any time!
- Sales Manager : Jinny
- Email : sales5@xrjdcs.com
- Whatsapp/Mobile:+86 18250705533
Global renowned brand cooperation
ABB 丨 GE 丨Allen Bradley 丨 Honeywell 丨 Emerson 丨 Bently Nevada 丨 Westinghouse
Triconex 丨 Foxboro 丨 ICS Triplex 丨 Hima 丨 Schneider 丨 Yokogawa 丨 Woodward
—————————————————————————————
Cut Maintenance Costs – Optimize operations and reduce expenses with our high-quality, affordable automation replacement parts.
Always Available – Essential automation parts are constantly in stock, ensuring zero downtime for your operations.
24/7 Support – Our team is ready around the clock to assist with urgent needs and inquiries.
Fast Delivery – Ready stock enables quick dispatch and fast shipping, keeping your operations running smoothly.
100% Quality Assurance – Every part is strictly tested to ensure reliability and long-term performance.
Competitive Pricing & Outstanding Service – Exceptional service and unbeatable pricing maximize your value.
Choose us today for peace of mind, cost savings, and operational efficiency like never before!
Write your message here and send it to us
