Lam Research 853-064887-011

Product Overview

The Lam Research 853-064887-011 is an RF-related source unit used in semiconductor manufacturing equipment. Available industry listings identify it as a 13.56 MHz RF Source Unit, while other listings describe the same part number as a signal conditioner/control unit or RF matching-related assembly.

Designed for integration into Lam Research semiconductor processing systems, this component supports the RF portion of equipment operation where stable signal generation, conditioning, and delivery are important. It is particularly relevant to plasma-based wafer processing applications, where RF energy must be managed consistently to maintain process stability.

For fabs maintaining mature Lam Research equipment, the 853-064887-011 can be an important replacement or spare component when the original unit requires servicing.

Key Technical Information

Rather than relying on unverified electrical ratings, the following information focuses on specifications that can be supported by available product references:

• Manufacturer: Lam Research
• Part Number: 853-064887-011
• Component Type: RF Source Unit / RF-related control assembly
• Associated Frequency: 13.56 MHz
• Application: Semiconductor processing equipment
• Function: RF source, signal conditioning, and related RF control
• Equipment Environment: Semiconductor fabrication systems
• Part Status: Replacement and maintenance spare component

Industry listings specifically identify 853-064887-011 as a 13.56 MHz RF Source Unit, and a trade listing also associates the part with RF filter-box assembly terminology.

Main Features

The 853-064887-011 offers several practical advantages for semiconductor equipment maintenance:

RF Process Support
The unit is associated with 13.56 MHz RF systems, a commonly used RF frequency in plasma processing equipment.

Equipment Compatibility
As a Lam Research OEM part number, it is intended for use within compatible Lam Research equipment configurations.

Maintenance-Friendly Replacement
Using the correct part number can simplify replacement activities and reduce the uncertainty associated with adapting a generic RF component.

Stable Signal Management
RF source and conditioning hardware plays an important role in maintaining predictable energy delivery to plasma processing systems.

Suitable for Spare-Part Programs
For fabs operating older or continuously running equipment, maintaining a tested spare can help reduce downtime when an RF-related assembly fails.

Internal Structure and Components

The exact internal circuit architecture of the 853-064887-011 should be verified against the applicable Lam Research equipment documentation and revision level. In general, an RF source-related assembly of this type may incorporate RF signal-generation or conditioning circuitry, connectors, filtering components, control electronics, shielding, and mechanical mounting hardware.

The external interfaces are especially important because RF assemblies require proper connections and controlled impedance paths. Incorrect cabling, loose connectors, contamination, or unsuitable replacement hardware can negatively affect RF performance.

Therefore, the part number and revision should always be checked before installation.

Typical Applications

The Lam Research 853-064887-011 is intended for use in semiconductor manufacturing equipment, particularly systems involving RF-driven processing.

Potential application areas include:

• Plasma processing
• Wafer etching
• Semiconductor fabrication
• RF-assisted process chambers
• Plasma generation systems
• Semiconductor equipment refurbishment
• OEM equipment maintenance

Because RF performance can directly influence plasma behavior, the condition of the RF source assembly can be important for maintaining repeatable wafer-processing results.

Installation and Maintenance

Before replacing the 853-064887-011, technicians should first confirm the equipment model, configuration, part number, and applicable revision. Power should be fully isolated before disconnecting the assembly.

During installation, inspect RF connectors, cables, mounting points, and surrounding components. Make sure connectors are clean and securely installed. Avoid excessive mechanical force on RF connections.

After installation, the equipment should be operated according to the manufacturer’s maintenance procedures. Technicians should monitor RF-related alarms, process stability, reflected-power behavior, and other available system diagnostics.

For used or refurbished units, functional testing before installation is strongly recommended.

Why Choose 853-064887-011?

The Lam Research 853-064887-011 is a specialized RF component rather than a general-purpose automation module. Its value comes from maintaining compatibility with the semiconductor equipment in which it is installed.

For equipment owners, maintenance companies, and semiconductor spare-parts suppliers, sourcing the correct OEM part number can help reduce troubleshooting time and support faster equipment restoration.

We supply Lam Research 853-064887-011 for semiconductor equipment maintenance and replacement requirements. Availability, condition, revision, and testing status can be confirmed according to your specific purchasing requirements.

Cut Maintenance Costs – Optimize operations and reduce expenses with our high-quality, affordable automation replacement parts.

Always Available – Essential automation parts are constantly in stock, ensuring zero downtime for your operations.

24/7 Support – Our team is ready around the clock to assist with urgent needs and inquiries.

Fast Delivery – Ready stock enables quick dispatch and fast shipping, keeping your operations running smoothly.

100% Quality Assurance – Every part is strictly tested to ensure reliability and long-term performance.

Competitive Pricing & Outstanding Service – Exceptional service and unbeatable pricing maximize your value.

Choose us today for peace of mind, cost savings, and operational efficiency like never before!